Micro- and Nano-electronics Processing
Our faculty in micro- and nano-electronics processing apply fundamental chemical
engineering and materials science principles towards developing next generation
processes and creating new technologies for semiconductor devices and nano-materials
with transfer of emerging developments in electronics and nanotechnologies into
the core curriculum. Our approach is engineering science-based, utilizing transport
processes, reaction kinetics, thermodynamics, process control, statistics and
materials characterization. Systems include vapor phase, plasma, liquid phase
(chemical bath), electrochemical and fluidized beds. These techniques and systems
are applied to projects such as large area flexible electronics, mass production
of electrically active carbon nanotubes, improvement of adhesion in polymer-metal
interfaces, advanced process control of thin gate oxidation and yield modeling
of defects in integrated circuit manufacturing.
Faculty
- Chih-hung Chang - Research
focus: Flexible Transistors, Nanotechnology, Surface Characterization.
- David Hackleman - Research
focus: Linus Pauling Chair, Industrial Collaboration.
- Sho Kimura - Research focus:
Nanotechnology, High Temperature Deposition and Growth.
- Milo Koretsky - Research focus:
Plasma Processing, Chemical Vapor Deposition, Chemical Mechanical Planarization,
Nanotechnology.
- Keith Levien - Research focus:
Advanced Process Control.
- Skip Rochefort - Research
focus: Polymer Processing & Characterization.
- Alex Yokochi: Research focus:
Nanotechnology, Materials Characterization.
Current Research Topics
Recent Projects
|
