Spin Coating of Fluids on Silicon Wafers
The beginning of microprocessors

By:
Samantha Lewis and Sarah Quint

Mentor:
Kwame Adom

Faculty:
Dr. Skip Rochefort

The students study the effects of contact angles, surface tension, and viscosity and relate it with an ideal coating fluid. Various Broofield standard viscosity fluids are used for the actual spin coating and the effects of viscosity, spin speed, and spin time are tested to obtain a film thickness. The wafers are weighed before and after the coating to find the increase in mass, by dividing the mass by the density multiplied by the area, the students obtain a film thickness of the coating fluid on the wafer. Graphs are produced to compare the film thickness with regards to the three variables controlled during the experiment (viscosity, spin speed, and spin time), and conclusions are made based on the data.