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Chemical Mechanical Planarization: Making Silicon Wafers “flat enough” to produce Pentium Chips

By:
Eran Chantrell and Bobby O'Ryan

Mentors:
Jason Hower

Faculty:
Dr. Milo Koretsky

Summary of Project

College of Engineering. 101 Covell Hall, Oregon State University. Corvallis, OR 97331-2409
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